purk
Headphoneus Supremus
- Joined
- Sep 26, 2001
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Leading the way again K P Wachara!! Man...you really outdone yourself again this time.
By far, the most pressing need for humidity control in a semiconductor cleanroom comes from photoresist sensitivities. It's photoresist that demands the tightest (most expensive) control limits because its properties are so sensitive to relative humidity.
Actually, both relative humidity and temperature are critical for resist stability and precise dimensional control. Even at constant temperature, photoresist viscosity decreases rapidly with increasing relative humidity. Changing viscosity, of course, changes the thickness of a resist film spun-on by a fixed coating recipe. Reference 2 cites an experimental demonstration in which a three percent variation in relative humidity produced a thickness variation of 59.2 A (sic) in resist thickness.
In addition, resist swelling following a bake cycle can be aggravated by water absorption at high relative humidity. Resist adhesion can also be adversely affected by high relative humidity; low humidity (~30 percent) facilitates resist adhesion even without polymeric modifiers, such as hexamethyldisilazane (HMDS).
Relative humidity control in a semiconductor cleanroom is not optional. But, from time to time, it's good to review the reasons and bases for common, universally accepted practices.
"Why control humidity in a cleanroom?", Robert P. Donovan, Solid State Technology
I see that DIY drivers use a FR4 ring to hold the diaphragm. What material the SR-009's ring is made of? Is it metal like the stators?
I wonder if, contrary to the use of a FR4 ring to hold the diaphragm, a metal ring worsens the dimensional control of the ring/diaphragm structure.
Thanks n3rdling, dude_500 and chinsettwong.
I knew spacers need to insulate stators and diaphragm, but I did not know the Lamda series had brass rings. So do they use electrical insulating coating at the rings or stators?
I have been a fool trying to figure out what is happening, because there are too many variables…
I like the idea of point #4. I agree, it seems complicated. Best I could come up with is you have oversized, overly thick spacers on a diaphragm set at the lowest "desired" tension within the range. The stators would be threaded inside the inner diameter of the oversized spacers (variable stator spacing). Attached to the stators, however, would be "secondary" spacers. These secondary spacers would actually determine your diaphragm's active area and stator spacing. As you screw the first stator into place its secondary spacer applies the desired tension to the diaphragm by pushing on the diaphragm creating a "plateau" shape in it. Then the second stator is tightened to clamp the diaphragm down. I'd imagine the threads would have to be pretty fine in order to achieve high adjustment resolution and I think it would be better if the secondary spacers were more like washers (not attached to the stators) so that they would move in/out freely and apply less rotational force to the diaphragm when the second stator is tightened.