In one sense Moore's law has already broken - in that it was a doubling of transistors every 2 years or so, for the same die area, and the assumption being that the cost for that die would be constant - hence the cost per transistor (or FET) would half every two years. This rule was broken some time ago in that price per component is rising as the difficulties in going to smaller feature sizes means much more costs - indeed a 3nm mask cost is expected to be an extraordinary 500M to 1.5B USD according to
here. Masks are unique for the design of chip that you want - so a new design needs another set of masks, and in this case another 1B USD or so. Scary numbers...
Mask costs for a 150nm was a relatively trivial 0.3M USD when I was working with silicon companies. At the moment 28nm is the sweet spot for silicon, in terms of price per transistor.
And of course being at 3nm we are now talking about 15 atoms of silicon (and before anybody comments node size and actual true feature size is no longer the case due to marketing lies), so Moore's law is approaching destruction anyway.